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Free-standing carbon nanotube films for extreme ultraviolet pellicle application
Publication:
Free-standing carbon nanotube films for extreme ultraviolet pellicle application
Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Timmermans, Marina
;
Pollentier, Ivan
;
Mariano, Marina
;
Korytov, Maxim
;
Liebens, Maarten
;
Schapmans, Elie
;
Huyghebaert, Cedric
;
Gallagher, Emily
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2152
since deposited on 2021-10-27
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Acq. date: 2025-10-24
Citations
Metrics
Views
2152
since deposited on 2021-10-27
452
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations