Browsing by author "Terwagne, G."
Now showing items 1-3 of 3
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Advanced characterization of high-K materials: a nuclear approach
Brijs, Bert; Huyghebaert, Cedric; Nauwelaerts, Sophie; Caymax, Matty; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Bergmaier, A.; Dollinger, G.; Lennard, W. N.; Terwagne, G.; Vantomme, Andre (2002) -
Profile changes and self-sputtering during low energy ion implantation
Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Lindsay, Richard; Collart, E.J.H.; Kirkwood, D.A.; Mathot, G.; Terwagne, G. (2002) -
Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD
Brijs, Bert; Huyghebaert, Cedric; Nauwelaerts, Sophie; Caymax, Matty; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Bergmaier, A.; Dollinger, G.; Lennard, W. N.; Terwagne, G.; Vantomme, Andre (2001)