Authors
Brijs, Bert;
Huyghebaert, Cedric;
Nauwelaerts, Sophie;
Caymax, Matty;
Vandervorst, Wilfried;
Nakajima, K.;
Kimura, K.;
Bergmaier, A.;
Dollinger, G.;
Lennard, W. N.;
Terwagne, G.;
Vantomme, Andre
Conference
15th International Conference on Ion Beam Analysis (IBA); July 2001; Cairns, Australia.
Title
Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD
Publication type
Oral presentation
