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Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD

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2097 since deposited on 2021-10-14
1last month
Acq. date: 2026-09-21

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2097 since deposited on 2021-10-14
1last month
Acq. date: 2026-09-21

Citations