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Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD
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Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD
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Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brijs, Bert
;
Huyghebaert, Cedric
;
Nauwelaerts, Sophie
;
Caymax, Matty
;
Vandervorst, Wilfried
;
Nakajima, K.
;
Kimura, K.
;
Bergmaier, A.
;
Dollinger, G.
;
Lennard, W. N.
;
Terwagne, G.
;
Vantomme, Andre
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2094
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Acq. date: 2025-12-09
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Metrics
Views
2094
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-09
Citations