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Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD

Date

2001
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dc.contributor.authorBrijs, Bert
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorNauwelaerts, Sophie
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNakajima, K.
dc.contributor.authorKimura, K.
dc.contributor.authorBergmaier, A.
dc.contributor.authorDollinger, G.
dc.contributor.authorLennard, W. N.
dc.contributor.authorTerwagne, G.
dc.contributor.authorVantomme, Andre
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-14T16:39:04Z
dc.date.available2021-10-14T16:39:04Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5098
dc.source.conference15th International Conference on Ion Beam Analysis (IBA); July 2001; Cairns, Australia.
dc.source.conferencelocation
dc.title

Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD

dc.typeOral presentation
dspace.entity.typePublication
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