Browsing by author "Patz, M."
Now showing items 1-2 of 2
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Characterisation of JSR's spin-on hardmask FF-02
Das, Arabinda; Le, Quoc Toan; Furukawa, Yukiko; Nguyen Hoang, Viet; Terzieva, Valentina; de Theije, Femke; Whelan, Caroline; Maenhoudt, Mireille; Struyf, Herbert; Tokei, Zsolt; Iacopi, Francesca; Stucchi, Michele; Carbonell, Laure; Vos, Ingrid; Bender, Hugo; Patz, M.; Beyer, Gerald; Van Hove, Marleen; Maex, Karen (2003) -
Interaction of a variety of ashing plasma with MSQ low-k dielectric
Le, Quoc Toan; Patz, M.; Struyf, Herbert; Baklanov, Mikhaïl; Boullart, Werner; Vanhaelemeersch, Serge; Maex, Karen (2004)