Interaction of a variety of ashing plasma with MSQ low-k dielectric

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Authors
Le, Quoc Toan; Patz, M.; Struyf, Herbert; Baklanov, Mikhaïl; Boullart, Werner; Vanhaelemeersch, Serge; Maex, Karen
Conference
Extended Abstracts of the 205th Meeting of the Electrochemical Society
Title
Interaction of a variety of ashing plasma with MSQ low-k dielectric
Publication type
Meeting abstract
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