Publication:

Interaction of a variety of ashing plasma with MSQ low-k dielectric

Date

2004
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorPatz, M.
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorBoullart, Werner
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.date.accessioned2021-10-15T14:23:48Z
dc.date.available2021-10-15T14:23:48Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9185
dc.source.beginpage140
dc.source.conferenceExtended Abstracts of the 205th Meeting of the Electrochemical Society
dc.source.conferencedate9/05/2004
dc.source.conferencelocationSan Antonio, TX USA
dc.title

Interaction of a variety of ashing plasma with MSQ low-k dielectric

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions