Browsing by author "Smith, Jeffrey"
Now showing items 1-5 of 5
-
Enabling complimentary FET (CFET) fabrication: selective, isotropic etch of Group IV semiconductors
Kal, Subhadeep; Oniki, Yusuke; Falugh, Matthew; Pereira, Cheryl; Wang, Qi; Holsteyns, Frank; Smith, Jeffrey; Mosden, Aelan; Kumar, Kaushik; Boemmels, Juergen; Ryckaert, Julien; Biolsi, Peter; Hurd, Trace Q (2019) -
Plasma etch selectivity study and material screening for Self-Aligned Gate Contact (SAGC)
Radisic, Dunja; Demand, Marc; Chan, Shihsheng; Demuynck, Steven; Kumar, Kaushik; Metz, Andrew; Teugels, Lieve; Sun, Junling; Smith, Jeffrey; Sebaai, Farid; Hopf, Toby; Altamirano Sanchez, Efrain (2019) -
PPAC scaling enablement for 5nm Mobile SoC technology
Baradoglu, Mustafa; Xu, Jeff; Zhu, John; Yang, Da; Bao, Jerry; Song, Seung-Chul; Feng, Peijie; Ritzenthaler, Romain; Mertens, Hans; Eneman, Geert; Horiguchi, Naoto; Smith, Jeffrey; Datta, Suman; Kohen, David; Chan, Po-Wen; Chen, Keagan; Chidambaram, PR. Chidi (2017) -
Ruthenium recess for buried power rail integration
Gupta, Anshul; Grzeskowiak, Jodi; Jourdan, Nicolas; Yu, Kai-Hung; Joy, Nicolas; Kundu, Shreya; Teugels, Lieve; Boemmels, Juergen; Adelmann, Christoph; Heylen, Nancy; Jamieson, Geraldine; Smith, Jeffrey; Raley, Angelique; deVilliers, Anton; Biesemans, Serge; Wilson, Chris; Leusink, Gert; Tokei, Zsolt (2019) -
Selective isotropic etching of Group IV semiconductors to enable gate all around device architectures
Kal, Subhadeep; Pereira, Cheryl; Oniki, Yusuke; Holsteyns, Frank; Smith, Jeffrey; Mosden, Aelan; Kumar, Kaushik; Biolsi, Peter; Hurd, Trace Q. (2018)