PPAC scaling enablement for 5nm Mobile SoC technology

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Authors
Baradoglu, Mustafa; Xu, Jeff; Zhu, John; Yang, Da; Bao, Jerry; Song, Seung-Chul; Feng, Peijie; Ritzenthaler, Romain; Mertens, Hans; Eneman, Geert; Horiguchi, Naoto; Smith, Jeffrey; Datta, Suman; Kohen, David; Chan, Po-Wen; Chen, Keagan; Chidambaram, PR. Chidi
Conference
47th European Solid-State Devices Research Conference - ESSDERC
Title
PPAC scaling enablement for 5nm Mobile SoC technology
Publication type
Proceedings paper
Embargo date
9999-12-31
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