PPAC scaling enablement for 5nm Mobile SoC technology

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Author(s)

Baradoglu, Mustafa

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Song, Seung-Chul

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Ritzenthaler, Romain

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Horiguchi, Naoto

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Chidambaram, PR. Chidi

Metrics

2016 since deposited on 2021-10-24

Acq. date: 2025-10-24