Browsing by author "Brand, Adam"

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Highly scalable bulk FinFET devices with multi-VT options by conductive metal gate stack tuning for the 10-nm node and beyond

Ragnarsson, Lars-Ake; Chew, Soon Aik; Dekkers, Harold; Toledano Luque, Maria; Parvais, Bertrand; De Keersgieter, An; Van Ammel, Annemie; Schram, Tom; Yoshida, Naomi; Phatak, Anup; Han, Keping; Colombeau, Benjamin; Brand, Adam; Horiguchi, Naoto; Thean, Aaron (2014)
RMG nMOS 1st process enabling 10x lower gate resistivity in N7 bulk FinFETs

Ragnarsson, Lars-Ake; Dekkers, Harold; Schram, Tom; Chew, Soon Aik; Parvais, Bertrand; Dehan, Morin; Devriendt, Katia; Tao, Zheng; Sebaai, Farid; Baerts, Christina; Van Elshocht, Sven; Yoshida, Naomi; Phatak, Anup; Lazik, Christoph; Brand, Adam; Clark, William; Fried, David; Mocuta, Dan; Barla, Kathy; Horiguchi, Naoto; Thean, Aaron (2015)