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Highly scalable bulk FinFET devices with multi-VT options by conductive metal gate stack tuning for the 10-nm node and beyond
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1 since deposited on 2021-10-22
Acq. date: 2025-10-24
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2028 since deposited on 2021-10-22
Acq. date: 2025-10-24
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1 since deposited on 2021-10-22
Acq. date: 2025-10-24
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2028 since deposited on 2021-10-22
Acq. date: 2025-10-24
Citations