RMG nMOS 1st process enabling 10x lower gate resistivity in N7 bulk FinFETs

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Authors
Ragnarsson, Lars-Ake; Dekkers, Harold; Schram, Tom; Chew, Soon Aik; Parvais, Bertrand; Dehan, Morin; Devriendt, Katia; Tao, Zheng; Sebaai, Farid; Baerts, Christina; Van Elshocht, Sven; Yoshida, Naomi; Phatak, Anup; Lazik, Christoph; Brand, Adam; Clark, William; Fried, David; Mocuta, Dan; Barla, Kathy; Horiguchi, Naoto; Thean, Aaron
Conference
Symposium on VLSI Technology
Title
RMG nMOS 1st process enabling 10x lower gate resistivity in N7 bulk FinFETs
Publication type
Proceedings paper
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