Publication:

RMG nMOS 1st process enabling 10x lower gate resistivity in N7 bulk FinFETs

Date

2015
Proceedings Paper
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Author(s)

Ragnarsson, Lars-Ake  
;
Dekkers, Harold  
;
Schram, Tom  
;
Chew, Soon Aik
;
Parvais, Bertrand  
;
Dehan, Morin
;
Devriendt, Katia  
;
Tao, Zheng  
;
Sebaai, Farid  
;
Baerts, Christina  
;
Van Elshocht, Sven  
;
Yoshida, Naomi
;
Phatak, Anup
;
Lazik, Christoph
;
Brand, Adam
;
Clark, William
;
Fried, David
;
Mocuta, Dan
;
Barla, Kathy  
;
Horiguchi, Naoto  
;
Thean, Aaron  

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Abstract

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1958 since deposited on 2021-10-22
Acq. date: 2026-02-26

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1958 since deposited on 2021-10-22
Acq. date: 2026-02-26

Citations