Publication:

RMG nMOS 1st process enabling 10x lower gate resistivity in N7 bulk FinFETs

Date

2015
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Ragnarsson, Lars-Ake  
;
Dekkers, Harold  
;
Schram, Tom  
;
Chew, Soon Aik
;
Parvais, Bertrand  
;
Dehan, Morin
;
Devriendt, Katia  
;
Tao, Zheng  
;
Sebaai, Farid  
;
Baerts, Christina  
;
Van Elshocht, Sven  
;
Yoshida, Naomi
;
Phatak, Anup
;
Lazik, Christoph
;
Brand, Adam
;
Clark, William
;
Fried, David
;
Mocuta, Dan
;
Barla, Kathy  
;
Horiguchi, Naoto  
;
Thean, Aaron  

Journal

Abstract

Description

Metrics

Views

1955 since deposited on 2021-10-22
Acq. date: 2025-12-10

Citations

Metrics

Views

1955 since deposited on 2021-10-22
Acq. date: 2025-12-10

Citations