Browsing by author "Van den Berg, Jaap"
Now showing items 1-4 of 4
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Atomic layer deposition of ruthenium thin films from (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru: process characteristics, surface chemistry, and film properties
Popovici, Mihaela Ioana; Groven, Benjamin; Marcoen, Kristof; Phung, Quan; Dutta, Shibesh; Swerts, Johan; Meersschaut, Johan; Van den Berg, Jaap; Franquet, Alexis; Moussa, Alain; Vanstreels, Kris; Lagrain, Pieter; Bender, Hugo; Jurczak, Gosia; Van Elshocht, Sven; Delabie, Annelies; Adelmann, Christoph (2017) -
High resolution depth profile analysis of ultra-thin STO/TiN layers on Si by LEIS
Brongersma, Hidde; Bauer, Peter; Brüner, Philipp; Grehl, Thomas; Van den Berg, Jaap; Adelmann, Christoph (2012) -
Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness
Van den Berg, Jaap; Reading, Michael; Bailey, Paul; Noakes, Tim; Adelmann, Christoph; Popovici, Mihaela Ioana; Tielens, Hilde; Conard, Thierry; De Gendt, Stefan; Van Elshocht, Sven (2013) -
Understanding the interface reactions of rutile TiO2 grown by atomic layer deposition on oxidized ruthenium
Popovici, Mihaela Ioana; Delabie, Annelies; Adelmann, Christoph; Meersschaut, Johan; Franquet, Alexis; Tallarida, Massimo; Van den Berg, Jaap; Richard, Olivier; Swerts, Johan; Tomida, Kazuyuki; Kim, Min-Soo; Tielens, Hilde; Bender, Hugo; Conard, Thierry; Jurczak, Gosia; Van Elshocht, Sven; Schmeisser, Dieter (2013)