Browsing by author "Chabal, Y.J."

Now showing items 1-2 of 2

Gate oxide atomic layer deposition studied by in situ infrared spectroscopy

Frank, M.M.; Dörmann, S.; Chabal, Y.J.; Sayan, S.; Garfunkel, E.; Wilk, G.D.; Green, M.L.; Delabie, Annelies; Brijs, Bert (2003)
Initial growth kinetics of ALD Al2O3 and HfO2 and post-annealing effects

Wilk, G.D.; Frank, M.; Ho, M.Y.; Green, Martin; Chabal, Y.J.; Raisanen, P.; Brijs, Bert; Sorsch, T.W. (2002)