Initial growth kinetics of ALD Al2O3 and HfO2 and post-annealing effects

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Authors
Wilk, G.D.; Frank, M.; Ho, M.Y.; Green, Martin; Chabal, Y.J.; Raisanen, P.; Brijs, Bert; Sorsch, T.W.
Conference
Atomic Layer Deposition Conference - ALD
Title
Initial growth kinetics of ALD Al2O3 and HfO2 and post-annealing effects
Publication type
Oral presentation
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