Browsing by author "Xu, Xiaopeng"

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Analysis of copper plasticity impact in TSV-middle and backside TSV-last fabrication processes

Guo, Wei; Karmarkar, Aditya; Xu, Xiaopeng; Van der Plas, Geert; Van Huylenbroeck, Stefaan; Gonzalez, Mario; Absil, Philippe; El Sayed, Karim; Beyne, Eric (2015)
Performance and reliability impact of copper plasticity in backside TSV-last fabrication process

Karmarkar, Aditya P.; Guo, Wei; Xu, Xiaopeng; Van der Plas, Geert; Van Huylenbroeck, Stefaan; Gonzalez, Mario; Absil, Philippe; El Sayed, Karim; Beyne, Eric (2016)