Browsing by author "Budiarto, E."
Now showing items 1-6 of 6
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Carrier illumination as a tool to probe implant dose and electrical activation
Vandervorst, Wilfried; Clarysse, Trudo; Brijs, Bert; Loo, Roger; Peytier, Ivan; Pawlak, Bartek; Budiarto, E.; Borden, P. (2003) -
Carrier illumination for characterization of ultra-shallow doping profiles
Clarysse, Trudo; Lindsay, Richard; Vandervorst, Wilfried; Budiarto, E.; Borden, Peter (2003) -
Carrier illumination for characterization of ultrashallow doping profiles
Clarysse, Trudo; Lindsay, Richard; Vandervorst, Wilfried; Budiarto, E.; Borden, P. (2004-02) -
Carrier illumination for monitoring of CMOS ultra-shallow junctions
Clarysse, Trudo; Vandervorst, Wilfried; Lindsay, Richard; Borden, P.; Budiarto, E. (2002) -
Junction and profile analysis using carrier illumination
Clarysse, Trudo; Vandervorst, Wilfried; Lindsay, Richard; Borden, P.; Budiarto, E.; Madsen, J.; Nijmeijer, R. (2002) -
On the sensitivity of carrier illumination to processing steps
Vandervorst, Wilfried; Clarysse, Trudo; Pawlak, Bartek; Budiarto, E.; Borden, Peter (2003)