Carrier illumination as a tool to probe implant dose and electrical activation

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Authors
Vandervorst, Wilfried; Clarysse, Trudo; Brijs, Bert; Loo, Roger; Peytier, Ivan; Pawlak, Bartek; Budiarto, E.; Borden, P.
Conference
Characterization and Metrology for ULSI Technology
Title
Carrier illumination as a tool to probe implant dose and electrical activation
Publication type
Proceedings paper
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