Publication:

Carrier illumination as a tool to probe implant dose and electrical activation

Date

2003
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.contributor.authorBrijs, Bert
dc.contributor.authorLoo, Roger
dc.contributor.authorPeytier, Ivan
dc.contributor.authorPawlak, Bartek
dc.contributor.authorBudiarto, E.
dc.contributor.authorBorden, P.
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-15T07:27:09Z
dc.date.available2021-10-15T07:27:09Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8323
dc.source.beginpage758
dc.source.conferenceCharacterization and Metrology for ULSI Technology
dc.source.conferencedate24/03/2003
dc.source.conferencelocationAustin USA
dc.source.endpage763
dc.title

Carrier illumination as a tool to probe implant dose and electrical activation

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions