Browsing by author "Schumann, T."
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Millisecond flash lamp annealing of shallow implanted layers in Ge
Wündisch, C.; Posselt, M.; Schmidt, B.; Heera, V.; Schumann, T.; Mücklich, A.; Grötzschel, R.; Skorupa, W.; Clarysse, Trudo; Simoen, Eddy; Hortenbach, H. (2009) -
Millisecond flash lamp annealing of ultrashallow implanted layers in Ge
Posselt, M.; Wündisch, C.; Schmidt, B.; Schumann, T.; Mücklich, A.; Skorupa, W.; Clarysse, Trudo; Simoen, Eddy; Hortenbach, H. (2009)