Millisecond flash lamp annealing of ultrashallow implanted layers in Ge

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Authors
Posselt, M.; Wündisch, C.; Schmidt, B.; Schumann, T.; Mücklich, A.; Skorupa, W.; Clarysse, Trudo; Simoen, Eddy; Hortenbach, H.
Conference
216th ECS Meeting
Title
Millisecond flash lamp annealing of ultrashallow implanted layers in Ge
Publication type
Meeting abstract
Embargo date
9999-12-31
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