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Conference contributions
Millisecond flash lamp annealing of ultrashallow implanted layers in Ge
Publication:
Millisecond flash lamp annealing of ultrashallow implanted layers in Ge
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Posselt, M.
;
Wündisch, C.
;
Schmidt, B.
;
Schumann, T.
;
Mücklich, A.
;
Skorupa, W.
;
Clarysse, Trudo
;
Simoen, Eddy
;
Hortenbach, H.
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Views
1902
since deposited on 2021-10-18
1
last month
1
last week
Acq. date: 2025-12-11
Citations