Millisecond flash lamp annealing of shallow implanted layers in Ge

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Authors

Wündisch, C.; Posselt, M.; Schmidt, B.; Heera, V.; Schumann, T.; Mücklich, A.; Grötzschel, R.; Skorupa, W.; Clarysse, Trudo; Simoen, Eddy; Hortenbach, H.

ISSN

0003-6951

Issue

25

Journal

Applied Physics Letters

Volume

95

Title

Millisecond flash lamp annealing of shallow implanted layers in Ge

Publication type

Journal article

Embargo date

9999-12-31

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