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Millisecond flash lamp annealing of shallow implanted layers in Ge
Publication:
Millisecond flash lamp annealing of shallow implanted layers in Ge
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wündisch, C.
;
Posselt, M.
;
Schmidt, B.
;
Heera, V.
;
Schumann, T.
;
Mücklich, A.
;
Grötzschel, R.
;
Skorupa, W.
;
Clarysse, Trudo
;
Simoen, Eddy
;
Hortenbach, H.
Journal
Applied Physics Letters
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Downloads
1
since deposited on 2021-10-18
Acq. date: 2025-12-11
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1923
since deposited on 2021-10-18
3
last month
Acq. date: 2025-12-11
Citations