Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Millisecond flash lamp annealing of shallow implanted layers in Ge
Publication:
Millisecond flash lamp annealing of shallow implanted layers in Ge
Date
2009
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
20463.pdf
162.5 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wündisch, C.
;
Posselt, M.
;
Schmidt, B.
;
Heera, V.
;
Schumann, T.
;
Mücklich, A.
;
Grötzschel, R.
;
Skorupa, W.
;
Clarysse, Trudo
;
Simoen, Eddy
;
Hortenbach, H.
Journal
Applied Physics Letters
Abstract
Description
Metrics
Downloads
1
since deposited on 2021-10-18
Acq. date: 2025-10-24
Views
1919
since deposited on 2021-10-18
429
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Downloads
1
since deposited on 2021-10-18
Acq. date: 2025-10-24
Views
1919
since deposited on 2021-10-18
429
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations