Browsing by author "Gutt, T."
Now showing items 1-4 of 4
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Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies
Lauwers, A.; Besser, Paul; Gutt, T.; Satta, Alessandra; de Potter de ten Broeck, Muriel; Lindsay, Richard; Roelandts, Nico; Loosen, Fred; Stucchi, Michele; Vrancken, Christa; Deweerdt, Bruno; Maex, Karen (1999) -
Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies
Lauwers, A.; Besser, Paul; Gutt, T.; Satta, Alessandra; de Potter de ten Broeck, Muriel; Lindsay, Richard; Roelandts, Nico; Loosen, Fred; Jin, S.; Bender, Hugo; Stucchi, Michele; Vrancken, Evi; Deweerdt, Bruno; Maex, Karen (2000) -
In-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometer
Kondoh, Eiichi; Vereecke, Guy; Heyns, Marc; Maex, Karen; Gutt, T.; Nényei, Z. (1998) -
Measurements of trace gaseous ambient impurities on an atmospheric pressure rapid thermal processor
Kondoh, Eiichi; Vereecke, Guy; Heyns, Marc; Maex, Karen; Gutt, T. (1999)