Browsing by author "Muraki, Yusuke"
Now showing items 1-3 of 3
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Controlled isotropic etches for Gate-All-Around (GAA) device architectures
Muraki, Yusuke; Oniki, Yusuke; Kenis, Karine; Altamirano Sanchez, Efrain; Holsteyns, Frank; Kal, Subhadeep; Alix, Cheryl; Kumar, Kaushik; Mosden, Aelan (2020) -
Enhanced light coupling into nanostructured arrays as an enabler for advanced Raman-based metrology
Nuytten, Thomas; Bogdanowicz, Janusz; Gawlik, Andrzej; Oniki, Yusuke; Kenis, Karine; Muraki, Yusuke; Charley, Anne-Laure; Fleischmann, Claudia; De Wolf, Ingrid; van der Heide, Paul (2021) -
Spectroscopy: A new route towards critical-dimension metrology of the cavity etch of nanosheet transistors
Bogdanowicz, Janusz; Oniki, Yusuke; Kenis, Karine; Muraki, Yusuke; Nuytten, Thomas; Sergeant, Stefanie; Franquet, Alexis; Spampinato, Valentina; Conard, Thierry; Hoflijk, Ilse; Meersschaut, Johan; Claessens, Niels; Moussa, Alain; Van Den Heuvel, Dieter; Hung, Joey; Koret, Roy; Charley, Anne-Laure; Leray, Philippe (2021)