Authors

Bogdanowicz, Janusz; Oniki, Yusuke; Kenis, Karine; Muraki, Yusuke; Nuytten, Thomas; Sergeant, Stefanie; Franquet, Alexis; Spampinato, Valentina; Conard, Thierry; Hoflijk, Ilse; Meersschaut, Johan; Claessens, Niels; Moussa, Alain; Van Den Heuvel, Dieter; Hung, Joey; Koret, Roy; Charley, Anne-Laure; Leray, Philippe

Conference

Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV

Title

Spectroscopy: A new route towards critical-dimension metrology of the cavity etch of nanosheet transistors

Publication type

Proceedings paper