Publication:

Spectroscopy: A new route towards critical-dimension metrology of the cavity etch of nanosheet transistors

Date

2021

Proceedings Paper

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Author(s)

Bogdanowicz, Janusz

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Nuytten, Thomas

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Sergeant, Stefanie

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Franquet, Alexis

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Spampinato, Valentina

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Conard, Thierry

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;

Meersschaut, Johan

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Claessens, Niels

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Van Den Heuvel, Dieter

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Charley, Anne-Laure

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Leray, Philippe

Statistics

2033 since deposited on 2021-10-31

Acq. date: 2026-03-16