Now showing items 1-3 of 3
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AFMs reveal 3-D semiconductor features
De Wolf, Peter; Chollet, Frederic; Vandervorst, Wilfried (1995) -
Nanometer-scale roughness analysis of Si surfaces by TM-AFM for low-temperature epitaxy
Chollet, Frederic; Caymax, Matty; Vandervorst, Wilfried; André, E. (1995) -
Si(100) epitaxy by low-temperature UHV-CVD: AFM study of the initial stages of growth
Chollet, Frederic; André, E.; Vandervorst, Wilfried; Caymax, Matty (1995)