Browsing by author "Braun, Simon"
Now showing items 1-2 of 2
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Challenges in BEOL cleaning for the 10 nm node and beyond
Yu, David; Le, Quoc Toan; Braun, Simon; Kesters, Els; Shen, Mary; Klipp, Andreas; Holsteyns, Frank (2014) -
Wet clean in BEOL interconnect: Post etch residue removal and material compatibility
Kesters, Els; Le, Quoc Toan; Yu, David; Shen, Mary; Braun, Simon; Klipp, Andreas; Holsteyns, Frank (2014)