Browsing by author "Kidd, S. J."
Now showing items 1-2 of 2
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Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrology
De Bokx, P. K.; Kidd, S. J.; Wiener, G.; Urbach, H. P.; De Gendt, Stefan; Mertens, Paul; Heyns, Marc (1998) -
Silicon surface metal contamination measurements using grazing-emission XRF spectrometry
De Gendt, Stefan; Kenis, Karine; Baeyens, Martien; Mertens, Paul; Heyns, Marc; Wiener, G.; Kidd, S. J.; Knotter, D. M.; De Bokx, P. K. (1997)