Silicon surface metal contamination measurements using grazing-emission XRF spectrometry

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Authors
De Gendt, Stefan; Kenis, Karine; Baeyens, Martien; Mertens, Paul; Heyns, Marc; Wiener, G.; Kidd, S. J.; Knotter, D. M.; De Bokx, P. K.
Conference
Science and Technology of Semiconductor Surface Preparation
Title
Silicon surface metal contamination measurements using grazing-emission XRF spectrometry
Publication type
Proceedings paper
Embargo date
9999-12-31
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