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Silicon surface metal contamination measurements using grazing-emission XRF spectrometry
Publication:
Silicon surface metal contamination measurements using grazing-emission XRF spectrometry
Date
1997
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Gendt, Stefan
;
Kenis, Karine
;
Baeyens, Martien
;
Mertens, Paul
;
Heyns, Marc
;
Wiener, G.
;
Kidd, S. J.
;
Knotter, D. M.
;
De Bokx, P. K.
Journal
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1969
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-08
Citations
Metrics
Views
1969
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-08
Citations