Browsing by author "Engelen, A."
Now showing items 1-3 of 3
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Impact of high order aberrations on the performance of the aberration monitor
Dirksen, P.; Juffermans, C.; Engelen, A.; De Bisschop, Peter; Muellerke, H. (2000) -
Implementation of pattern-specific illumination pupil optimization on Step & Scan systems
Engelen, A.; Socha, R.; Hendrickx, Eric; Scheepers, W.; Nowak, F.; van Dam, M.; Liebchen, Armin; Faas, D. (2004) -
Separable models for computational lithography
Liu, Hua-Yu; Zhao, Q.; Chen, J.F.; Jiang, J.; Socha, B.; Van Setten, E.; Engelen, A.; Meessen, J.; Crouse, M.M.; Feng, M.; Shao, W.; Cao, H.; Cao, Y.; Van Look, Lieve; Bekaert, Joost; Vandenberghe, Geert; Finders, Jo (2008)