Implementation of pattern-specific illumination pupil optimization on Step & Scan systems

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Authors
Engelen, A.; Socha, R.; Hendrickx, Eric; Scheepers, W.; Nowak, F.; van Dam, M.; Liebchen, Armin; Faas, D.
Conference
Optical Microlithography XVII
Title
Implementation of pattern-specific illumination pupil optimization on Step & Scan systems
Publication type
Proceedings paper
Embargo date
9999-12-31
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