Publication:

Implementation of pattern-specific illumination pupil optimization on Step & Scan systems

Date

2004
Proceedings Paper
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dc.contributor.authorEngelen, A.
dc.contributor.authorSocha, R.
dc.contributor.authorHendrickx, Eric
dc.contributor.authorScheepers, W.
dc.contributor.authorNowak, F.
dc.contributor.authorvan Dam, M.
dc.contributor.authorLiebchen, Armin
dc.contributor.authorFaas, D.
dc.contributor.imecauthorHendrickx, Eric
dc.date.accessioned2021-10-15T13:21:19Z
dc.date.available2021-10-15T13:21:19Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8885
dc.source.beginpage1323
dc.source.conferenceOptical Microlithography XVII
dc.source.conferencedate22/02/2004
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage1333
dc.title

Implementation of pattern-specific illumination pupil optimization on Step & Scan systems

dc.typeProceedings paper
dspace.entity.typePublication
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