Browsing by author "De Messemaeker, Jo"
Now showing items 1-3 of 3
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Impact of ceria properties and CMP parameters on STI CMP performance
De Messemaeker, Jo; Put, Stijn; Nelis, Daniel; Van den bosch, Jeroen; Strauven, Yvan; Lippens, Paul; Sinapi, Fabrice; Ong, Patrick; Devriendt, Katia (2007) -
Impact of ceria properties and CMP parameters on STI CMP performance
De Messemaeker, Jo; Sinapi, Fabrice; Ong, Patrick; Put, Stijn; Nelis, Daniel; Van den bosch, Jeroen; Strauven, Yvan; Lippens, Paul; Devriendt, Katia (2007) -
Stabilisation and control of improved nano-ceria dispersions for STI CMP slurries
De Messemaeker, Jo; Kellens, Kristof; Van Genechten, Dirk; Put, Stijn; Nelis, Daniel; Strauven, Yvan; Ong, Patrick; Devriendt, Katia (2008)