Impact of ceria properties and CMP parameters on STI CMP performance

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Authors
De Messemaeker, Jo; Put, Stijn; Nelis, Daniel; Van den bosch, Jeroen; Strauven, Yvan; Lippens, Paul; Sinapi, Fabrice; Ong, Patrick; Devriendt, Katia
Conference
International Conference on Planarization/CMP Technology - ICPT
Title
Impact of ceria properties and CMP parameters on STI CMP performance
Publication type
Proceedings paper
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