Publication:

Impact of ceria properties and CMP parameters on STI CMP performance

Date

2007
Proceedings Paper
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dc.contributor.authorDe Messemaeker, Jo
dc.contributor.authorPut, Stijn
dc.contributor.authorNelis, Daniel
dc.contributor.authorVan den bosch, Jeroen
dc.contributor.authorStrauven, Yvan
dc.contributor.authorLippens, Paul
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorOng, Patrick
dc.contributor.authorDevriendt, Katia
dc.contributor.imecauthorVan den bosch, Jeroen
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.date.accessioned2021-10-16T15:31:26Z
dc.date.available2021-10-16T15:31:26Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11957
dc.source.beginpage303
dc.source.conferenceInternational Conference on Planarization/CMP Technology - ICPT
dc.source.conferencedate25/10/2007
dc.source.conferencelocationDresden Germany
dc.source.endpage308
dc.title

Impact of ceria properties and CMP parameters on STI CMP performance

dc.typeProceedings paper
dspace.entity.typePublication
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