Browsing by author "Kohlpoth, Stephanie"

Now showing items 1-2 of 2

Defect printability for 100-nm design rule using 193nm lithography

Philipsen, Vicky; Jonckheere, Rik; Kohlpoth, Stephanie; Torres, Andres (2002)
Printability of hard and soft defects in 193-nm lithography

Philipsen, Vicky; Jonckheere, Rik; Kohlpoth, Stephanie; Friedrich, Christoph M.; Torres, Juan Andres (2002)