Publication:

Defect printability for 100-nm design rule using 193nm lithography

Date

2002

Proceedings Paper

Simple item page Full metadata Statistics

Files

6286.pdf 1.39 MB

Author(s)

Philipsen, Vicky

;

Jonckheere, Rik

;

Kohlpoth, Stephanie

;

Statistics

1902 since deposited on 2021-10-14

Acq. date: 2026-02-27