Browsing by author "Stokhof, Maarten"
Now showing items 1-4 of 4
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Improved cost-effectiveness of the block co-polymer anneal process for DSA
Pathangi Sriraman, Hari; Stokhof, Maarten; Knaepen, Werner; Vaid, Varun; Mallik, Arindam; Chan, BT; Vandenbroeck, Nadia; Maes, Jan; Gronheid, Roel (2016) -
Opportunities and challenges for integration of ALD barrier layers in damascene process flows
Sprey, Hessel; Schuhmacher, Jorg; Travaly, Youssef; Sutcliffe, Victor; Abell, Thomas; Bastings, Hans; Stokhof, Maarten; Haukka, Suvi; Li, Wei-Min; Beyer, Gerald; Raaijmakers, Ivo (2004) -
Process and properties of ALD tungsten nitride carbide barrier films for interconnects
Schuhmacher, Jörg; Travaly, Youssef; Beyer, Gerald; Stokhof, Maarten; Schaekers, Marc; Maex, Karen (2004) -
Process and properties of ALD tungsten nitride carbide barrier films for interconnects
Schuhmacher, Jörg; Tokei, Zsolt; Beyer, Gerald; Li, Yunlong; Stokhof, Maarten; Schaekers, Marc; Maex, Karen (2003)