Browsing by author "Kwakman, Laurens"
Now showing items 1-4 of 4
-
Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices
Johanesen, Hayley; Strauss, Michael; Kenslea, Anne; Hakala, Chris; Kwakman, Laurens; Boullart, Werner; Mertens, Hans; Siew, Yong Kong; Barla, Kathy (2019) -
Statistical significance of STEM based metrology on advanced 3D transistor structures
Kwakman, Laurens; Kenslea, Anne; Johanesen, Hayley; Strauss, Michael; Boullart, Werner; Mertens, Hans; Siew, Yong Kong; Barla, Kathy (2019) -
Surface contamination and electrical damage by focused ion beam: conditions applicable to the extraction of TEM lamellae from nano-electronic devices
Bender, Hugo; Franquet, Alexis; Drijbooms, Chris; Parmentier, Brigitte; Clarysse, Trudo; Vandervorst, Wilfried; Kwakman, Laurens (2015) -
Surface redeposition and damage due to focused ion beam milling
Bender, Hugo; Franquet, Alexis; Drijbooms, Chris; Parmentier, Brigitte; Vandervorst, Wilfried; Kwakman, Laurens (2015)