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Surface contamination and electrical damage by focused ion beam: conditions applicable to the extraction of TEM lamellae from nano-electronic devices
Publication:
Surface contamination and electrical damage by focused ion beam: conditions applicable to the extraction of TEM lamellae from nano-electronic devices
Date
2015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bender, Hugo
;
Franquet, Alexis
;
Drijbooms, Chris
;
Parmentier, Brigitte
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Kwakman, Laurens
Journal
Semiconductor Science and Technology
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1953
since deposited on 2021-10-22
Acq. date: 2025-10-25
Citations
Metrics
Views
1953
since deposited on 2021-10-22
Acq. date: 2025-10-25
Citations