Authors

Bender, Hugo; Franquet, Alexis; Drijbooms, Chris; Parmentier, Brigitte; Clarysse, Trudo; Vandervorst, Wilfried; Kwakman, Laurens

ISSN

0268-1242

Issue

11

Journal

Semiconductor Science and Technology

Volume

30

Title

Surface contamination and electrical damage by focused ion beam: conditions applicable to the extraction of TEM lamellae from nano-electronic devices

Publication type

Journal article