Browsing by author "Philipossian, A."

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The IMEC clean : A new concept for particle and metal removal on Si surfaces

Meuris, Marc; Mertens, Paul; Opdebeeck, Ann; Schmidt, Harald; Depas, Michel; Vereecke, Guy; Heyns, Marc; Philipossian, A. (1995)
The IMEC Clean concept : an advanced wafer cleaning technology

Meuris, Marc; Verhaverbeke, Steven; Mertens, Paul; Schmidt, Harald; Rotondaro, Antonio; Heyns, Marc; Depas, Michel; Philipossian, A.; Vatel, Oliver (1994)