Browsing by author "Nozawa, S."
Now showing items 1-4 of 4
-
A Novel Volatile Film for Dielectric Plasma Damage Protection
de Marneffe, Jean-Francois; Rezvanov, Askar; Chanson, Romain; Babaei Gavan, Khashayar; Fujikawa, M.; Yamaguchi, T.; Nozawa, S.; Kikuchi, Y.; Maekawa, K. (2019) -
Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials
de Marneffe, Jean-Francois; Fujikawa, T.M.; Yamaguchi, T.; Nozawa, S.; Niino, R.; Sato, N.; Chanson, R.; Babaei Gavan, Khashayar; Rezvanov, Askar; Lazzarino, Frederic; Tokei, Zsolt (2018) -
Novel volatile film for the protection of organo-silicate glass dielectric materials
Fujikawa, Makoto; Yamaguchi, Tatsuya; Nozawa, S.; Kikuchi, Y.; Maekawa, Kaoru; Kawasaki, H.; Chanson, Romain; de Marneffe, Jean-Francois (2019) -
Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics
de Marneffe, Jean-Francois; Yamaguchi, Tatsuya; Fujikawa, Makoto; Rezvanov, Askar; Chanson, Romain; Zhang, Jianran; Babaei Gavan, Khashayar; El Otell, Ziad; Nozawa, S.; Kikuchi, Y.; Maekawa, Kaoru (2019)