Authors

de Marneffe, Jean-Francois; Yamaguchi, Tatsuya; Fujikawa, Makoto; Rezvanov, Askar; Chanson, Romain; Zhang, Jianran; Babaei Gavan, Khashayar; El Otell, Ziad; Nozawa, S.; Kikuchi, Y.; Maekawa, Kaoru

ISSN

2637-6113

Issue

12

Journal

ACS Applied Electronic Materials

Volume

1

Title

Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics

Publication type

Journal article